Low resistive Au-free, Ta-based, recessed ohmic contacts to InAlN/AlN/GaN heterostructures

Author: Bergsten J   Malmros A   Tordjman M   Gamarra P   Lacam C   Forte-Poisson M-A di   Rorsman N  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|10|105034-105040

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.10, 2015-10, pp. : 105034-105040

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