Study of contact resistivity, mechanical integrity, and thermal stability of Ti/Al and Ta/Al ohmic contacts to n-type GaN

Author： Luther B. Mohney S. Delucca J. Karlicek R.

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.27, Iss.4, 1998-04, pp. : 196-199

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