Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|6|65015-65023

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.6, 2015-12, pp. : 65015-65023

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