Analysis of resonant planar dissipative network antennas for rf inductively coupled plasma sources

Author： Guittienne Ph   Howling A A   Hollenstein Ch  

Publisher： IOP Publishing

E-ISSN： 1361-6595|23|1|15006-15018

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.1, 2014-02, pp. : 15006-15018

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Resonant RF network antennas for large-area and large-volume inductively coupled plasma sources

By Hollenstein Ch   Guittienne Ph   Howling A A  

Plasma Sources Science and Technology, Vol. 22, Iss. 5, 2013-10 ,pp. : 55021-55030

IOP Publishing

Access to resources Recommend Favorite

Titanium oxidation by rf inductively coupled plasma

By  

Journal of Physics: Conference Series , Vol. 511, Iss. 1, 2014-05 ,pp. : 423-427

IOP Publishing

Access to resources Recommend Favorite

Complex image method for RF antenna-plasma inductive coupling calculation in planar geometry. Part II: measurements on a resonant network

By  

Plasma Sources Science and Technology, Vol. 24, Iss. 6, 2015-12 ,pp. : 65015-65023

IOP Publishing

Access to resources Recommend Favorite

Styrene and methyl methacrylate copolymer synthesized by RF inductively coupled plasma

By  

Journal of Physics: Conference Series , Vol. 275, Iss. 1, 2011-01 ,pp. : 170-177

IOP Publishing

Access to resources Recommend Favorite

Inductively-coupled dusty plasma

By  

Le Journal de Physique IV, Vol. 10, Iss. PR5, 2000-03 ,pp. : Pr5-399-Pr5-402

Edp Sciences

Access to resources Recommend Favorite