Publisher: IOP Publishing
E-ISSN: 1361-6501|26|12|127002-127008
ISSN: 0957-0233
Source: Measurement Science and Technology, Vol.26, Iss.12, 2015-12, pp. : 127002-127008
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
FILTER STRUCTURE FOR SUB-MICRON FILTRATION FABRICATED IN SILICON
Le Journal de Physique Colloques, Vol. 49, Iss. C4, 1988-09 ,pp. :