Fabrication and characterization of areal roughness specimens for applications in scanning probe microscopy

Author： Chen Yuhang   Zhang Xiangchao   Luo Tingting   Liu Xiaoning   Huang Wenhao  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.24, Iss.5, 2013-05, pp. : 55402-55410

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