A concave-patterned TiN/PECVD-Si3N4 /TiN diaphragm MEMS acoustic sensor based on a polyimide sacrificial layer

E-ISSN： 1361-6439|25|12|125022-125034

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125022-125034

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