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IOP Publishing

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Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

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Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments

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A current driven capacitively coupled chlorine discharge

By Huang Shuo   Gudmundsson J T  

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A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code

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