Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations

Author： Merlijn van Spengen W.   Puers R.   Mertens R.   De Wolf Ingrid  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.2, 2004-01, pp. : 89-96

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