A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

Author： Ferraris Eleonora Fassi Irene Masi Biagio Rosing Richard Richardson Andrew

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 1053-1061

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