Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process

Author： Pérennès F.   Ghigo M.   Tormen M.   Cabrini S.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.6-7, 2004-10, pp. : 552-555

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