Fabrication of a spiral microcoil using a 3D-LIGA process

By Mekaru Harutaka   Kusumi Shinji   Sato Noriaki   Shimizu Masami   Yamashita Michiru   Shimada Osamu   Hattori Tadashi  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 393-402

Springer Publishing Company

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Fabrication of diffraction grating for X-ray Talbot interferometer

By Matsumoto Masatake   Takiguchi Kinji   Tanaka Makoto   Hunabiki Yoichi   Takeda Hiroaki   Momose Atsushi   Utsumi Yuichi   Hattori Tadashi  

Microsystem Technologies, Vol. 13, Iss. 5-6, 2007-03 ,pp. : 543-546

Springer Publishing Company

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Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding angles

By Fu C.   Huang H.  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 293-298

Springer Publishing Company

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Ensuring repeatability in LIGA mold insert fabrication

By Schulz J.   Bade K.   Guttmann M.   Hahn L.   Janssen A.   Köhler U.   Meyer P.   Winkler F.  

Microsystem Technologies, Vol. 10, Iss. 5, 2004-08 ,pp. : 419-422

Springer Publishing Company

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High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material

By Lu Hong   Pillans Brandon   Lee Jong-Chan   Kim Kyunghwan   Lee Jeong-Bong  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 409-409

Springer Publishing Company

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