High aspect ratio spiral and vertical meander micro coils for actuator applications

Author： Seidemann V.   Kohlmeier T.   Föhse M.   Gatzen H. H.   Büttgenbach S.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.6-7, 2004-10, pp. : 564-570

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

A new removable resist for high aspect ratio applications

By Schirmer Matthias   Perseke Doris   Zena Eva   Schondelmaier Daniel   Rudolph Ivo   Loechel Bernd  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 335-338

Springer Publishing Company

Access to resources Recommend Favorite

A novel spark erosion technique for the fabrication of high aspect ratio micro-grooves

By Murali M.   Yeo S. H.  

Microsystem Technologies, Vol. 10, Iss. 8-9, 2004-11 ,pp. : 628-632

Springer Publishing Company

Access to resources Recommend Favorite

Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

By Sato H.   Houshi Y.   Shoji S.  

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 440-443

Springer Publishing Company

Access to resources Recommend Favorite

Metrology of high aspect ratio MEMS

By Nichols J. F.   Kurfess T. R.  

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 556-559

Springer Publishing Company

Access to resources Recommend Favorite

Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST

By Khan Malek Chantal  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1215-1216

Springer Publishing Company

Access to resources Recommend Favorite