A new removable resist for high aspect ratio applications

Author： Schirmer Matthias   Perseke Doris   Zena Eva   Schondelmaier Daniel   Rudolph Ivo   Loechel Bernd  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 335-338

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