Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

Author: Rezazadeh Ghader   Tahmasebi Ahmadali   Zubstov Mikhail  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.12, Iss.12, 2006-10, pp. : 1163-1170

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