Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators

Author: Ramezani Asghar   Alasty Aria   Akbari Javad  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.12, Iss.12, 2006-10, pp. : 1153-1161

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