Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining

Author： Cao D.   Jiang J.   Meng W.   Jiang J.   Wang W.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 503-510

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