A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation

Author： Lee Yeolho   Lim Geunbae   Moon Wonkyu  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 563-567

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