Author: Zhang H. Mitsuya Y. Yamada M. Fukuzawa K.
Publisher: Springer Publishing Company
ISSN: 0946-7076
Source: Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 895-904
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Fukui Shigehisa Shimizu Soichi Yamane Kiyomi Matsuoka Hiroshige
Microsystem Technologies, Vol. 13, Iss. 8-10, 2007-05 ,pp. :