Micromechanical characterization of electroplated permalloy films for MEMS

Author: Li Xueping   Ding Guifu   Ando Taeko   Shikida Mitsuhiro   Sato Kazuo  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.14, Iss.1, 2008-01, pp. : 131-134

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next