Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature

Author: Lackner J.M.   Waldhauser W.   Ebner R.   Bakker R.J.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.4-6, 2004-09, pp. : 1469-1471

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