Stress analysis and microstructure of PVD monolayer TiN and multilayer TiN/(Ti,Al)N coatings

Author： Carvalho N.J.M.   Zoestbergen E.   Kooi B.J.   De Hosson J.T.M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 179-189

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