Transient pressure induced by laser ablation of liquid toluene: toward the understanding of laser-induced backside wet etching

Author: Kawaguchi Y.   Ding X.   Narazaki A.   Sato T.   Niino H.  

Publisher: Springer Publishing Company

ISSN: 0947-8396

Source: Applied Physics A, Vol.79, Iss.4-6, 2004-09, pp. : 883-885

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