Influence of hydrogen on room temperature recrystallisation of electrodeposited Cu films: thermal desorption spectroscopy

Author： Fukumuro N   Adachi T   Yae S   Matsuda H   Fukai Y  

Publisher： Maney Publishing

ISSN： 0020-2967

Source： Transactions of the Institute of Metal Finishing, Vol.89, Iss.4, 2011-07, pp. : 198-201

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