3D Simulations on Surface Growth Via Chemical Vapour Deposition: Kinetic Monte Carlo Investigation

Author： Thongon Arjaree   Choopun Supab   Yimnirun Rattikorn   Laosiritaworn Yongyut  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.155, Iss.1, 2014-07, pp. : 100-105

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