Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage

Publisher: IOP Publishing

E-ISSN: 1361-6528|25|48|485704-485713

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.48, 2014-12, pp. : 485704-485713

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