Structural and Electrical Properties of Ba(Zr_xTi_1-x)O₃ Films Prepared by RF-magnetron Sputtering Using Metal Targets

Author： Kim Jin Woong Shima Hiromi Funakubo Hiroshi Nishida Ken Yamamoto Takashi

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.157, Iss.1, 2014-10, pp. : 101-113

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