Implementation of a four quadrant optic fibre bundle as a deflection sensor to get rid of heat sources in an AFM head

Author: BoukellalYounes   DucourtieuxSebastien  

Publisher: IOP Publishing

E-ISSN: 1361-6501|26|9|95403-95408

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.26, Iss.9, 2015-09, pp. : 95403-95408

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Abstract