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Materials and Manufacturing Processes, Vol. 25, Iss. 12, 2010-12 ,pp. : 1462-1469

Taylor & Francis Ltd

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Chemical Mechanical Polishing of Glass Disk Substrates: Preliminary Experimental Investigation

By Tian Y. B.  

Materials and Manufacturing Processes, Vol. 28, Iss. 4, 2013-04 ,pp. : 488-494

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Investigation of a Novel Diamond Disk's Effect on Pad Topography in Oxide Chemical Mechanical Polishing

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Materials and Manufacturing Processes, Vol. 25, Iss. 12, 2010-12 ,pp. : 1440-1448

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Ultrafine Polishing of Electroless Nickel–Phosphorus-Plated Mold with Magnetic Compound Fluid Slurry

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Nano-Precision Polishing of Oxygen-Free Copper Using MCF (Magnetic Compound Fluid) Slurry

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