Phase-Field Simulation for Effect of Annealing Temperature on Oxygen Clusters’ Evolution in Silicon Wafer

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1120|473-477

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1120, 2015-08, pp. : 473-477

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract