Mask Design Consideration for Low Aspect Ratio Wet Etch Micromachining on Silicon Substrate Planar Power Transformer

Publisher： Trans Tech Publications

E-ISSN： 1662-8985|2015|1109|227-231

ISSN： 1022-6680

Source： Advanced Materials Research, Vol.2015, Iss.1109, 2015-07, pp. : 227-231

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