Deposition of IGZO or ITZO Thin Films by Co-Sputtering of IZO and GZO or ITO Targets

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1110|197-202

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1110, 2015-07, pp. : 197-202

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