Study on Chemical Interaction Analysis of Reactive Fullerenol Molecules in Cu-CMP Using High-Sensitive Raman Spectroscopy

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2014|625|332-338

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2014, Iss.625, 2014-10, pp. : 332-338

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