The Effect of Inhibitors on Co Corrosion in Alkaline Post Cu-CMP Cleaning Solutions

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2016|255|255-259

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2016, Iss.255, 2016-10, pp. : 255-259

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Post CMP Wet Cleaning Influence on Cu Hillocks

By  

Solid State Phenomena, Vol. 2016, Iss. 255, 2016-10 ,pp. : 270-276

Trans Tech Publications

Access to resources Recommend Favorite

Characterization of Cu-BTA Organic Complexes on Cu during Cu CMP and Post Cu Cleaning

By  

Solid State Phenomena, Vol. 2014, Iss. 219, 2014-01 ,pp. : 205-208

Trans Tech Publications

Access to resources Recommend Favorite

Effect of Viscoelasticity of PVA Brush on Friction during Post-CMP Cleaning: A Guideline for Nodule Configuration

By  

Solid State Phenomena, Vol. 2014, Iss. 219, 2014-01 ,pp. : 148-152

Trans Tech Publications

Access to resources Recommend Favorite

Understanding the Formation of Circular Ring Defects in Post-CMP Cleaning

By  

Solid State Phenomena, Vol. 2014, Iss. 219, 2014-01 ,pp. : 153-156

Trans Tech Publications

Access to resources Recommend Favorite

Ultrasonic cleaning in alkaline solutions with hydroquinone as cavitation activator

By Niemczewski B.  

Transactions of the Institute of Metal Finishing, Vol. 85, Iss. 4, 2007-07 ,pp. : 202-206

Maney Publishing

Access to resources Recommend Favorite