Influence of Process Parameters on the Properties of TiO₂ Films Deposited by a D.C. Magnetron Sputtering System on Glass Support

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2015|660|86-92

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2015, Iss.660, 2015-09, pp. : 86-92

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