Publisher： Trans Tech Publications
E-ISSN： 1662-9752|2015|821|157-160
ISSN： 0255-5476
Source： Materials Science Forum, Vol.2015, Iss.821, 2015-07, pp. : 157-160
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
150mm Silicon Carbide Selective Embedded Epitaxial Growth Technology by CVD
Materials Science Forum, Vol. 2017, Iss. 897, 2017-06 ,pp. :
Access to resources
Recommend
150 mm 4H-SiC Epitaxial Layer Growth in a Warm-Wall Planetary Reactor
Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. :
SiC Epitaxial Growth in a 7x100mm/3x150mm Horizontal Hot-Wall Batch Reactor
Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. :
Improvement on 150 mm 4H-SiC Epitaxial Wafer Quality
Materials Science Forum, Vol. 2016, Iss. 858, 2016-06 ,pp. :