Influence of Substrate Temperature on the Al and Zr Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering

E-ISSN： 1662-9752|2015|814|601-606

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2015, Iss.814, 2015-04, pp. : 601-606

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