Nanostructure of ZnO thin films prepared by reactive rf magnetron sputtering

Author: Takai O.   Futsuhara M.   Shimizu G.   Lungu C.P.   Nozue J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 117-119

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Abstract