Effect of Nitrogen Content on Mechanical and Tribological Properties of HfC_xN_y Films Deposited by Reactive Magnetron Sputtering

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2015|817|143-149

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2015, Iss.817, 2015-05, pp. : 143-149

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