Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition

Publisher： John Wiley & Sons Inc

E-ISSN： 1521-3773|54|50|15014-15021

ISSN： 1433-7851

Source： ANGEWANDTE CHEMIE INTERNATIONAL EDITION, Vol.54, Iss.50, 2015-12, pp. : 15014-15021

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