Mechanical strains in pecvd SiN

Author: Semenova O.   Kozelskaya A.   Zhi-Yong Li   Yu-De Yu  

Publisher: IOP Publishing

E-ISSN: 1741-4199|24|10|106801-106805

ISSN: 1674-1056

Source: Chinese Physics B, Vol.24, Iss.10, 2015-10, pp. : 106801-106805

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Abstract