Mechanical losses of oscillators fabricated in silicon wafers

Author： Mitrofanov V P   Prokhorov L G  

Publisher： IOP Publishing

E-ISSN： 1361-6382|32|19|195002-195008

ISSN： 0264-9381

Source： Classical and Quantum Gravity, Vol.32, Iss.19, 2015-10, pp. : 195002-195008

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