Characterization of Cu-BTA Organic Complexes on Cu during Cu CMP and Post Cu Cleaning

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2014|219|205-208

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2014, Iss.219, 2014-01, pp. : 205-208

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Abstract