Study on the Etching Selectivity of Oxide Films in Dry Cleaning Process with NF3 and H2O

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2016|255|86-90

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2016, Iss.255, 2016-10, pp. : 86-90

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