Optimal PID control of a nano-Newton CMOS-MEMS capacitive force sensor for biomedical applications

Author： Mozhdehi Reza Jalil Ghafari Ali Selk

E-ISSN： 2257-7750|15|2|139-145

ISSN： 2257-7777

Source： Mechanics & Industry, Vol.15, Iss.2, 2014-05, pp. : 139-145

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