A multichannel reflectance anisotropy spectrometer for epitaxial growth monitoring

Author: Ariza-Flores D   Ortega-Gallegos J   Núñez-Olvera O   Balderas-Navarro R E   Lastras-Martínez L F   Guevara-Macías L E   Lastras-Martinez A  

Publisher: IOP Publishing

E-ISSN: 1361-6501|26|11|115901-115905

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.26, Iss.11, 2015-11, pp. : 115901-115905

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract