Modelling of an intermediate pressure microwave oxygen discharge reactor: from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

Author： Kemaneci Efe   Carbone Emile   Jimenez-Diaz Manuel   Graef Wouter   Rahimi Sara   Kroesen Gerrit   Kemaneci Efe  

Publisher： IOP Publishing

E-ISSN： 1361-6463|48|43|435203-435223

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.43, 2015-11, pp. : 435203-435223

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