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Author: Sun Rongrong Chang Lingqian Li Lei
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|115012-115022
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115012-115022
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