TiO2 patterns with wide photo-induced wettability change by a combination of reactive sputtering process and surface modification in a microfluidic channel

Author： Kobayashi Taizo   Konishi Satoshi  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|11|115014-115025

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115014-115025

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