Author： Qin Yutao An Seungdo Gianchandani Yogesh B
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|11|115026-115034
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115026-115034
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